Large-Scale Assembly of Silicon Nanowire Network-Based Devices Using Conventional Microfabrication Facilities

被引:107
作者
Heo, Kwang [1 ]
Cho, Eunhee [4 ]
Yang, Jee-Eun [5 ]
Kim, Myoung-Ha [6 ]
Lee, Minbaek [2 ]
Lee, Byung Yang [2 ]
Kwon, Soon Gu [3 ]
Lee, Moon-Sook [4 ]
Jo, Moon-Ho [5 ]
Choi, Heon-Jin [6 ]
Hyeon, Taeghwan [3 ]
Hong, Seunghun [1 ,2 ]
机构
[1] Seoul Natl Univ, Interdisciplinary Program Nanosci & Technol, Seoul 151747, South Korea
[2] Seoul Natl Univ, Dept Phys & Astron, Seoul 151747, South Korea
[3] Seoul Natl Univ, Sch Chem & Biol Engn, Seoul 151747, South Korea
[4] Samsung Elect Co Ltd, Semicond R&D Ctr, Proc Dev Team, Gyeonggi Do 446711, South Korea
[5] Pohang Univ Sci & Technol, Dept Mat Sci & Engn, Gyungbuk 790784, South Korea
[6] Yonsei Univ, Dept Mat Sci & Engn, Seoul 120749, South Korea
关键词
D O I
10.1021/nl802570m
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
We present a method for assembling silicon nanowires (Si-NWs) in virtually general shape patterns using only conventional microfabrication facilities. In this method, silicon nanowires were functionalized with amine groups and dispersed in deionized water. The functionalized Si-NWs exhibited positive surface charges in the suspensions, and they were selectively adsorbed and aligned onto negatively charged surface regions on solid substrates. As a proof of concepts, we, demonstrated transistors based on individual Si-NWs and long networks of Si-NWs.
引用
收藏
页码:4523 / 4527
页数:5
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