Energy band structure and electrical properties of (La2O3)1-x(SiO2)x(0≤x≤1)/n-GaAs(001) system -: art. no. 202102

被引:17
作者
Yang, JK [1 ]
Park, HH [1 ]
机构
[1] Yonsei Univ, Dept Ceram Engn, Seoul 120749, South Korea
基金
新加坡国家研究基金会;
关键词
D O I
10.1063/1.2130721
中图分类号
O59 [应用物理学];
学科分类号
摘要
This letter investigates the chemical bonding state and energy band structure of (La2O3)(1-x)(SiO2)(x)(0 <= x <= 1) films grown on sulfur-passivated n-GaAs (001). The dielectric bandgap and interfacial band alignment were modified by compounding the La2O3 films with SiO2. A shift in binding energy of the core level was observed by comparing the electronegativities of the second nearest-neighbor element. The controlled parameters of energy band structure were systematically monitored by valence band and absorption spectra. Band offset values were almost linearly related to the concentration of SiO2 when no Fermi level pinning in the midgap of n-GaAs was assumed. The correlation between band parameter and electrical properties, as probed by capacitance and leakage current measurements, is discussed. (C) 2005 American Institute of Physics.
引用
收藏
页码:1 / 3
页数:3
相关论文
共 22 条
[1]   Thermal stability of stacked high-k dielectrics on silicon [J].
Chang, JP ;
Lin, YS .
APPLIED PHYSICS LETTERS, 2001, 79 (23) :3824-3826
[2]   Formation of a stratified lanthanum silicate dielectric by reaction with Si(001) [J].
Copel, M ;
Cartier, E ;
Ross, FM .
APPLIED PHYSICS LETTERS, 2001, 78 (11) :1607-1609
[3]  
Cumpson PJ, 1997, SURF INTERFACE ANAL, V25, P430, DOI 10.1002/(SICI)1096-9918(199706)25:6<430::AID-SIA254>3.0.CO
[4]  
2-7
[5]   ANGLE-RESOLVED XPS AND AES - DEPTH-RESOLUTION LIMITS AND A GENERAL COMPARISON OF PROPERTIES OF DEPTH-PROFILE RECONSTRUCTION METHODS [J].
CUMPSON, PJ .
JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1995, 73 (01) :25-52
[6]   Molecular adsorption characteristics of lanthanum oxide surfaces: the interaction of water with oxide overlayers grown on Cu(111) [J].
De Asha, AM ;
Critchley, JTS ;
Nix, RM .
SURFACE SCIENCE, 1998, 405 (2-3) :201-214
[7]  
Dzhurinskii B.F., 1975, RUSS J INORG CHEM+, V20, P2307
[8]   Electrical characteristics of thermally evaporated HfO2 [J].
Garg, R ;
Chowdhury, NA ;
Bhaskaran, M ;
Swain, PK ;
Misra, D .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2004, 151 (10) :F215-F219
[9]   Properties of La-silicate high-K dielectric films formed by oxidation of La on silicon [J].
Gougousi, T ;
Kelly, MJ ;
Terry, DB ;
Parsons, GN .
JOURNAL OF APPLIED PHYSICS, 2003, 93 (03) :1691-1696
[10]   Bonding and XPS chemical shifts in ZrSiO4 versus SiO2 and ZrO2:: Charge transfer and electrostatic effects -: art. no. 125117 [J].
Guittet, MJ ;
Crocombette, JP ;
Gautier-Soyer, M .
PHYSICAL REVIEW B, 2001, 63 (12)