Effect of environment on the tribological behavior of Si-incorporated diamond-like carbon films

被引：76

作者：

Yang, SH

Kong, H

Lee, KR

Park, S

Kim, DE

机构：

[1] Korea Inst Sci & Technol, Tribol Res Ctr, Seoul 130650, South Korea

[2] Korea Adv Inst Sci & Technol, Thin Film Technol Res Ctr, Seoul, South Korea

[3] Yonsei Univ, Dept Mech Engn, Seoul 120749, South Korea

来源：

WEAR | 2002年 / 252卷 / 1-2期

关键词：

diamond-like carbon film; plasma-assisted chemical vapor deposition; silicon; wear debris; environment;

D O I：

10.1016/S0043-1648(01)00856-0

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

An experimental study was performed to discover the effect of environment on the tribological behavior of Si-incorporated diamond-like carbon (Si-DLC) film slid against a steel ball. The films were deposited on Si (10 0) wafers by a radio frequency glow discharge of mixtures of benzene and dilute silane gases. Experiments using a ball-on-disk test-rig were performed in vacuum, dry air and ambient air. It was observed that coefficient of friction decreased as the environment changed from vacuum to dry air. Results also showed that low and stable friction related closely to the smoothening of track surfaces and the formation of silicon-rich oxide debris. (C) 2002 Elsevier Science B.V All rights reserved.

引用

页码：70 / 79

页数：10

共 13 条

[1] Chemical, mechanical and tribological characterization of ultra-thin and hard amorphous carbon coatings as thin as 3.5 nm: recent developments [J].