An experimental study and modeling of the thickness distribution in pulsed laser deposited ferroelectric thin films

被引：13

作者：

Tyunina, M ^{[1
]}

Sreenivas, K ^{[1
]}

Bjormander, C ^{[1
]}

Wittborn, J ^{[1
]}

Rao, KV ^{[1
]}

机构：

[1] ROYAL INST TECHNOL,DEPT CONDENSED MATTER PHYS,S-10044 STOCKHOLM,SWEDEN

来源：

APPLIED SURFACE SCIENCE | 1996年 / 96-8卷

关键词：

This research has been supported by a grant from the Swedish funding agency NUTEK. M. Tyunina wishes to thank the Royal Institute of Technology for a visiting fellowship under their programme of support for scientists from the Baltic countries;

D O I：

10.1016/0169-4332(95)00592-7

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

We present a systematic experimental study of the thickness profiles and the growth rates of ferroelectric lead zirconium titanate (PZT) thin films, formed by pulsed laser deposition, both in vacuum and in an oxygen ambient. The results are explained in terms of the adiabatic expansion model for the laser generated plasma plume.

引用

页码：831 / 835

页数：5

共 5 条

[1] GAS-DYNAMICS AND FILM PROFILES IN PULSED-LASER DEPOSITION OF MATERIALS [J].