Uncooled infrared microbolometers on a flexible substrate

被引：21

作者：

Yaradanakul, A ^{[1
]}

Butler, DP ^{[1
]}

Çelik-Butler, Z ^{[1
]}

机构：

[1] So Methodist Univ, Dept Elect Engn, Dallas, TX 75275 USA

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 2002年 / 49卷 / 05期

基金：

美国国家科学基金会;

关键词：

bolometers; distributed sensors; flexible structures; infrared detectors; infrared image sensors; polyimide films; robot sensing systems; yttrium compounds;

D O I：

10.1109/16.998605

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Microbolometer infrared detectors based on semicon-ducting yttrium-barium-copper-oxide (YBCO) have been fabricated on a 125-mum-thick flexible polyimide substrate, Kapton((R)). During the fabrication process, the highest temperature reached was 270 degreesC, used to cure a polyimide insulation layer. The 60 mum X 60 mum microbolometers displayed a temperature coefficient of resistance of -3.07%fK at room temperature. The thermal conductivity of the structure was measured to be 4.18 X 10(-5) W/K. The bolometer response showed a linear dependence on bias current with a responsivity of 2 X 103 V/W and detectivity of 3 X 10(7) cm Hz(1/2)/W at 1.13 Hz and 1 muA bias.

引用

页码：930 / 933

页数：4

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