Effect of mis-orientation of mesa-stripes on the growth of InGaAs quantum wires by selective molecular beam epitaxy

被引:6
作者
Kihara, M [1 ]
Fujikura, H [1 ]
Hasegawa, H [1 ]
机构
[1] HOKKAIDO UNIV,GRAD SCH ELECT & INFORMAT ENGN,SAPPORO,HOKKAIDO 060,JAPAN
关键词
selective MBE growth; misoriented mesa-stripe; quantum wire; dot structure; InGaAs/InAlAs;
D O I
10.1016/S0169-4332(97)80166-3
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
In this paper, the effect of mis-orientation of mesa-stripes on the In0.53Ga0.47As ridge quantum wire formation in our selective MBE growth procedure is studied. Scanning electron microscope (SEM), atomic force microscope (AFM), and cathodoluminescence (CL) observations revealed that the InGaAs ridge quantum wires were modulated into segments along the wires by the growth on the mis-oriented mesa-stripes. Particularly, in the case of the mis-orientation angle of 13 degrees, pseudo-periodic segment formation was successfully achieved in the wires, resulting in the formation of a prl iodic array of 3-dimensional carrier confining dot structures.
引用
收藏
页码:695 / 699
页数:5
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