Influence of imaging parameters and specimen thinning on strain measurements in Au/Ni MBE multilayers by HREM image processing

Experimental distortion profiles have been measured in strained Au/Ni MBE multilayers using a quantitative analysis of the HREM micrographs. In order to study the reliability of these measurements, similar analysis have been made on simulated HREM images of Au/Ni interfaces. It is found that the measured profiles are reliable only on a limited range of experimental conditions i.e. microscope defocus and specimen thicknesses. Furthermore, it will be shown that the presence of a mixed layer introduced by the ion beam thinning on both sides of the cross section specimen affects considerably the shape of the strain profile recorded on thin areas.