Direct micro/nano metal patterning based on two-step transfer printing of ionic metal nano-ink

被引:24
作者
Kim, Sanghyeok [1 ,2 ]
Lee, Won Seok [1 ,2 ,3 ]
Lee, Jihye [3 ]
Park, Inkyu [1 ,2 ]
机构
[1] Korea Adv Inst Sci & Technol, Dept Mech Engn, Taejon 305701, South Korea
[2] Korea Adv Inst Sci & Technol, KI NanoCentury, Taejon 305701, South Korea
[3] Korea Inst Machinery & Mat, Dept Nano Mfg Technol, Taejon 305343, South Korea
基金
新加坡国家研究基金会;
关键词
SOFT LITHOGRAPHY; FABRICATION; NANOWIRES; NANOPARTICLES; ELECTRONICS; ALIGNMENT; MANIPULATION; INTEGRATION; TRANSISTORS; GRAPHENE;
D O I
10.1088/0957-4484/23/28/285301
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
We present a direct metal patterning method by a two-step transfer printing process of non-particle, ionic metal nano-ink solution. This fabrication method allows a simple direct patterning of various micro/nanoscale metallic structures. Complex structures such as multilayer line arrays, patterns along non-flat topologies, and micro/nanoscale hybrid patterns can be achieved by using this process. Also, the low temperature and pressure process conditions are compatible with the fabrication of electronic structures and devices on flexible substrates such as polyimide film and photographic papers. As an application of this process, we fabricated ZnO nanowire-based flexible UV sensors, where metal electrodes were fabricated by two-step transfer printing. In the case of ZnO nanowire sensors, highly sensitive and fast responding performances to UV illumination and good mechanical robustness against repeated bending conditions could be verified.
引用
收藏
页数:9
相关论文
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