Identification and quantification of defects in highly Si-doped GaAs by positron annihilation and scanning tunneling microscopy

被引:72
作者
Gebauer, J [1 ]
KrauseRehberg, R [1 ]
Domke, C [1 ]
Ebert, P [1 ]
Urban, K [1 ]
机构
[1] FORSCHUNGSZENTRUM JULICH, FORSCHUNGSZENTRUM, INST FESTKORPERFORSCH, D-52425 JULICH, GERMANY
关键词
D O I
10.1103/PhysRevLett.78.3334
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
Defects in highly Si-doped GaAs were identified and their concentration determined by combining positron lifetime spectroscopy with scanning tunneling microscopy. We observed with increasing Si-doping concentration an increasing concentration of a deep positron trap identified as Si-Ga-donor-Ga-vacancy complex. The concentration of shallow positron traps increased with the Si concentration too. The shallow traps are found to be Si-As acceptors and Si clusters.
引用
收藏
页码:3334 / 3337
页数:4
相关论文
共 26 条
[1]   MONOENERGETIC POSITRON BEAM STUDY OF SI-DOPED GAAS EPILAYERS GROWN BY LOW-PRESSURE METALORGANIC CHEMICAL VAPOR-DEPOSITION USING TERTIARYBUTYLARSINE [J].
CHICHIBU, S ;
IWAI, A ;
NAKAHARA, Y ;
MATSUMOTO, S ;
HIGUCHI, H ;
WEI, L ;
TANIGAWA, S .
JOURNAL OF APPLIED PHYSICS, 1993, 73 (08) :3880-3885
[2]   GALLIUM VACANCIES AND GALLIUM ANTISITES AS ACCEPTORS IN ELECTRON-IRRADIATED SEMIINSULATING GAAS [J].
CORBEL, C ;
PIERRE, F ;
SAARINEN, K ;
HAUTOJARVI, P ;
MOSER, P .
PHYSICAL REVIEW B, 1992, 45 (07) :3386-3399
[3]   DEFECTS IN SEMICONDUCTORS [J].
DANNEFAER, S .
RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1989, 112 (1-2) :65-76
[4]   Microscopic identification of the compensation mechanisms in Si-doped GaAs [J].
Domke, C ;
Ebert, P ;
Heinrich, M ;
Urban, K .
PHYSICAL REVIEW B, 1996, 54 (15) :10288-10291
[5]   Temperature dependent compensation of Zn-dopant atoms by vacancies in III-V semiconductor surfaces [J].
Ebert, P ;
Heinrich, M ;
Urban, K ;
Chao, KJ ;
Smith, AR ;
Shih, CK .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1996, 14 (03) :1807-1811
[6]   FORMATION OF ANION VACANCIES BY LANGMUIR EVAPORATION FROM INP(110) AND GAAS(110) SURFACES AT LOW-TEMPERATURES [J].
EBERT, P ;
HEINRICH, M ;
SIMON, M ;
URBAN, K ;
LAGALLY, MG .
PHYSICAL REVIEW B, 1995, 51 (15) :9696-9701
[7]   CHARGE-STATE-DEPENDENT STRUCTURAL RELAXATION AROUND ANION VACANCIES ON INP(110) AND GAP(110) SURFACES [J].
EBERT, P ;
URBAN, K ;
LAGALLY, MG .
PHYSICAL REVIEW LETTERS, 1994, 72 (06) :840-843
[8]   OBSERVATION OF BULK DEFECTS BY SCANNING-TUNNELING-MICROSCOPY AND SPECTROSCOPY - ARSENIC ANTISITE DEFECTS IN GAAS [J].
FEENSTRA, RM ;
WOODALL, JM ;
PETTIT, GD .
PHYSICAL REVIEW LETTERS, 1993, 71 (08) :1176-1179
[9]   AB-INITIO STUDY OF POSITRON TRAPPING AT A VACANCY IN GAAS [J].
GILGIEN, L ;
GALLI, G ;
GYGI, F ;
CAR, R .
PHYSICAL REVIEW LETTERS, 1994, 72 (20) :3214-3217
[10]   Atomic-scale structure and electronic properties of GaN/GaAs superlattices [J].
Goldman, RS ;
Feenstra, RM ;
Briner, BG ;
OSteen, ML ;
Hauenstein, RJ .
APPLIED PHYSICS LETTERS, 1996, 69 (24) :3698-3700