Moisture-resistance and displacement of piezoelectric multilayer actuator with interdigital-electrode-type structure

被引：2

作者：

Watanabe, J

Someji, T

Jomura, S

机构：

[1] Hitachi Met Ltd, Magnet & Elect Res Lab, Kumagaya, Saitama 3600843, Japan

[2] Hitachi Met Ltd, Prod Syst Res Lab, Kumagaya, Saitama 3600843, Japan

[3] Hitachi Met Ltd, Tottori Works, Tottori 6891121, Japan

来源：

JOURNAL OF THE CERAMIC SOCIETY OF JAPAN | 1999年 / 107卷 / 10期

关键词：

piezoelectric multilayer actuator; interdigital-electrode-type structure; moisture-resistance; displacement;

D O I：

10.2109/jcersj.107.978

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The structure of piezoelectric multilayer actuator with interdigital-electrode-type structure was investigated in order to improve both its moisture-resistance and displacement, The moisture-resistance was affected by the number of ceramic lavers and by the shape of its internal electrode as well, An actuator with 20 layers in which the length of the inactive electrostrictively part was 0.6 mm showed high moisture-resistance, and generated 1.7 mu m in displacement at DC 150 V. In addition, it was also observed that inhomogeneous sintering reaction in the actuator affects its moisture-resistance.

引用

页码：978 / 982

页数：5

共 11 条

[1] DESTRUCTION MECHANISMS IN CERAMIC MULTILAYER ACTUATORS [J].