MULTILAYER PIEZOELECTRIC CERAMIC VIBRATOR WITH INTERNAL ELECTRODES

被引：14

作者：

FUDA, Y

ONO, H

SHIOTANI, F

KUMASAKA, K

机构：

[1] Product Development Laboratory, Tokin Corporation, Taihakuku, 982

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1995年 / 34卷 / 9B期

关键词：

MULTILAYER PIEZOELECTRIC VIBRATOR; HIGH O-M CERAMIC MATERIAL; COFIRING; INTERNAL ELECTRODE; SINTERING REACTION; ULTRASONIC DEVICES;

D O I：

10.1143/JJAP.34.5270

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Multilayer piezoelectric vibrators made from high mechanical quality factor (Q(m)) PbZrTiO3 ceramic material with internal electrodes have been investigated for application to ultrasonic devices. Tile existence of internal electrodes activates the ceramic sintering reaction and as a result, cofiring of the the multilayer vibrator at a lower temperature becomes possible. Multilayer vibrators with 2-9 layers of internal electrodes were fabricated. and evaluated. The values of Q(m)>1500 and k(31)=0.36 can be obtained. It was found that high-power ultrasonic devices driven by low voltages.

引用

页码：5270 / 5272

页数：3