Micropatterning of lanthanum-based oxide thin film on self-assembled monolayers

被引：27

作者：

Gao, YF ^{[1
]}

Masuda, Y ^{[1
]}

Koumoto, K ^{[1
]}

机构：

[1] Nagoya Univ, Grad Sch Engn, Dept Appl Chem, Chikusa Ku, Nagoya, Aichi 4648603, Japan

来源：

JOURNAL OF COLLOID AND INTERFACE SCIENCE | 2004年 / 274卷 / 02期

关键词：

La2O3; thin film; self-assembled monolayer; aqueous solution;

D O I：

10.1016/j.jcis.2004.02.050

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

We studied the direct micropatterning of a lanthanum-based thin film on a template of self-assembled monolayers in an aqueous solution at 80degreesC. The template composed of silanol and octadecyl areas was prepared by UV-modified octadecyltrichlorosilane SAMs through a photomask. The amorphous La2O(CO3)(2)(.)xH(2)O thin films were selectively deposited in the silanol regions. Crystallized La2O3 was obtained after heating at 800degreesC in air. (C) 2004 Elsevier Inc. All rights reserved.

引用

页码：392 / 397

页数：6

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