Interdigitated humidity sensors for a portable clinical microsystem

被引：12

作者：

Laville, C ^{[1
]}

Pellet, C ^{[1
]}

N'Kaoua, G ^{[1
]}

机构：

[1] Univ Bordeaux 1, Lab IXL, F-33405 Talence, France

来源：

1ST ANNUAL INTERNATIONAL IEEE-EMBS SPECIAL TOPIC CONFERENCE ON MICROTECHNOLOGIES IN MEDICINE & BIOLOGY, PROCEEDINGS | 2000年

关键词：

D O I：

10.1109/MMB.2000.893849

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Here are presented and compared two capacitive humidity sensors with interdigitated electrodes for a portable clinical application. The first structures are covered by a polyimide sensitive layer and the optimised ones include a BCB sensitive layer and a heating resistor. Humidity measurements results are presented, in particular sensors response time in absorption which are very small (inferior to 500 ms). Then, mechanisms of absorption and adsorption in a polymer layer are described and the two structures are compared. Suitability of optimised sensors for our application is discussed : new structures permit to increase sensitivity and decrease response time. When the structure is maintained at 400degreesC by its heater, the response time is 200 ms and the total desorption time is 11 s.

引用

页码：572 / 577

页数：6

共 10 条

[1] HIGH-SENSITIVITY CMOS HUMIDITY SENSORS WITH ON-CHIP ABSOLUTE CAPACITANCE MEASUREMENT SYSTEM [J].