共 7 条
[1]
Vacuum system design for the 3 GeV-proton synchrotron of JAERI-KEK joint project
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
2002, 20 (03)
:829-832
[3]
Kobayashi S, 2000, P INT SYMP DISCH EL, V19, P41, DOI 10.1109/DEIV.2000.877247
[4]
Morimoto Y., 2002, J VAC SOC JPN, V45, P665, DOI [10.3131/jvsj.45.665, DOI 10.3131/JVSJ.45.665]
[5]
NISHIBA T, 2002, J VAC SOC JPN, V45, P590
[6]
Pit-free electropolishing of aluminum and its application for process chamber
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1998, 16 (03)
:1196-1200
[7]
TAJIRI K, 2000, P 3 EMT INT GARM PAR, P103