Modes of propagating light waves in thin films of boron nitride deposited by plasma enhanced chemical vapor deposition

被引：15

作者：

Boudiombo, J

Baehr, O

Boudrioua, A

Thevenin, P

Loulergue, JC

Bath, A

机构：

[1] Mat. Optiques Proprietes Specifiques, CLOES, Univ. de Metz et Sapelec, 57078 Metz Cedex 3

[2] Lab. Interfaces Composants M., CLOES, Univ. de Metz et Supelec, 57078 Metz Cedex 3

来源：

MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 1997年 / 46卷 / 1-3期

关键词：

waveguides; refractive index; bandgap;

D O I：

10.1016/S0921-5107(96)01940-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Waveguide films of boron nitride are fabricated by a plasma enhanced chemical vapor deposition (PECVD) process. Optical properties of films are investigated. Effective refractive indices of guided modes are used to determine refractive index and film thickness. A good optical quality has been obtained with an hexagonal structure. (C) 1997 Elsevier Science S.A.

引用

页码：96 / 98

页数：3

共 13 条

[1]

Abeles F, 1950, ANN PHYS-PARIS, V5, P596, DOI DOI 10.1051/ANPHYS/195012050596

[2]

BAEHR O, 1996, IN PRESS MAT SCI E B

[3] FABRICATION, CHARACTERIZATION AND ELECTROOPTIC PERFORMANCES OF PROTON-IMPLANTED WAVE-GUIDES IN LINBO3 [J].