Macroscopic simulation of quantum mechanical effects in 2-D MOS devices via the density gradient method

被引:21
作者
Connelly, D [1 ]
Yu, ZP
Yergeau, D
机构
[1] Acorn Technol, Palo Alto, CA 95630 USA
[2] Stanford Univ, Stanford, CA 94305 USA
关键词
capacitance; metal-oxide-semiconductor (MOS) devices; quantum theory; semiconductor device modeling; silicon; silicon-on-insulator (SOI) technology; simulation;
D O I
10.1109/16.992871
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Here, for the first time, are presented results of two-dimensional (2-D) simulations of metal-oxide-semiconductor (MOS) devices, including quantum mechanical modeling throughout the entire device region, calculated using the density gradient method. The importance of quantum mechanical modeling of the entire device structure, including the gate, source, drain, and channel, is demonstrated through one-dimensional (I-D) examples and through analysis of double and single-gated fully-depleted silicon-on-insulator (SOI) devices. A comparison of density gradient results with literature data is also presented.
引用
收藏
页码:619 / 626
页数:8
相关论文
共 22 条
[1]  
ABRAMO A, 2000, P SISPAD, P188
[2]   Equations of state for silicon inversion layers [J].
Ancona, MG .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2000, 47 (07) :1449-1456
[3]  
Ancona MG, 2000, IEEE T ELECTRON DEV, V47, P2310, DOI 10.1109/16.887013
[4]  
ANCONA MG, 1949, IEEE J TECHNOL COMPU
[5]  
ANCONA MG, 2001, INT WORKSH COMPUTATI
[6]   Effect of oxide interface roughness on the threshold voltage fluctuations in decanano MOSFETs with ultrathin gate oxides [J].
Asenov, A ;
Kaya, S .
2000 INTERNATIONAL CONFERENCE ON SIMULATION OF SEMICONDUCTOR PROCESSES AND DEVICES, 2000, :135-138
[7]   Increase in the random dopant induced threshold fluctuations and lowering in sub-100 nm MOSFETs due to quantum effects: A 3-D density-gradient simulation study [J].
Asenov, A ;
Slavcheva, G ;
Brown, AR ;
Davies, JH ;
Saini, S .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2001, 48 (04) :722-729
[8]  
BIEGEL BA, IN PRESS IEEE T ELEC
[9]   An experimental study of the effect of quantization on the effective electrical oxide thickness in MOS electron and hole accumulation layers in heavily doped Si [J].
Chindalore, G ;
Shih, WK ;
Jallepalli, S ;
Hareland, SA ;
Tasch, AF ;
Maziar, CM .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2000, 47 (03) :643-646
[10]  
CONNELLY D, 2001, P 2001 IEEE SISPAD, P90