Synthesis of carbon nitride films by hot filament assisted plasma sputtering

被引：21

作者：

Peng, J

Zhang, P

Guo, YP

Chen, GH

机构：

[1] LANZHOU UNIV,DEPT PHYS,LANZHOU 730001,PEOPLES R CHINA

[2] BEIJING POLYTECH UNIV,DEPT APPL PHYS,BEIJING 100022,PEOPLES R CHINA

来源：

MATERIALS LETTERS | 1996年 / 29卷 / 4-6期

关键词：

synthesis; carbon nitride; plasma sputtering;

D O I：

10.1016/S0167-577X(96)00147-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Carbon nitride films were synthesized by hot filament assisted plasma sputtering. These films were characterized by scanning electron microscopy (SEM), Auger electron spectroscopy (AES), X-ray diffraction (XRD), Raman spectrometry, and FTIR absorption spectra. The largest N to C atomic ratio obtained from AES was 21 at%. Raman bands at low frequency confirmed the existence of beta-C3N4 phase.

引用

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页码：191 / 194

页数：4

相关论文

共 11 条

[1]

FUJIMOTO F, 1993, JPN J APPL PHYS, V32, P420

[2] IS CARBON NITRIDE HARDER THAN DIAMOND - NO, BUT ITS GIRTH INCREASES WHEN STRETCHED (NEGATIVE POISSON RATIO) [J].

GUO, YJ ;

GODDARD, WA .

CHEMICAL PHYSICS LETTERS, 1995, 237 (1-2) :72-76

[3] STRUCTURAL AND OPTICAL-PROPERTIES OF AMORPHOUS-CARBON NITRIDE [J].

HAN, HX ;

FELDMAN, BJ .

SOLID STATE COMMUNICATIONS, 1988, 65 (09) :921-923

[4] POSSIBILITY OF CARBON NITRIDE FORMATION BY LOW-ENERGY NITROGEN IMPLANTATION INTO GRAPHITE - IN-SITU ELECTRON-SPECTROSCOPY STUDIES [J].

HOFFMAN, A ;

GOUZMAN, I ;

BRENER, R .

APPLIED PHYSICS LETTERS, 1994, 64 (07) :845-847

[5] GROWTH AND STRUCTURE OF C-N THIN-FILMS PREPARED BY RADIO-FREQUENCY REACTIVE SPUTTERING [J].

KUMAR, S ;

TANSLEY, TL .

SOLID STATE COMMUNICATIONS, 1993, 88 (10) :803-806

[6] PREDICTION OF NEW LOW COMPRESSIBILITY SOLIDS [J].

LIU, AY ;

COHEN, ML .

SCIENCE, 1989, 245 (4920) :841-842

[7] EXPERIMENTAL REALIZATION OF THE COVALENT SOLID CARBON NITRIDE [J].

NIU, CM ;

LU, YZ ;

LIEBER, CM .

SCIENCE, 1993, 261 (5119) :334-337

[8] CHEMICAL PREPARATION AND SHOCK-WAVE COMPRESSION OF CARBON NITRIDE PRECURSORS [J].

WIXOM, MR .

JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1990, 73 (07) :1973-1978

[9] SYNTHESIS OF CARBON NITRIDE FILMS BY MAGNETICALLY ROTATED ARC-PLASMA JET CHEMICAL-VAPOR-DEPOSITION [J].

YEN, TY ;

CHOU, CP .

SOLID STATE COMMUNICATIONS, 1995, 95 (05) :281-286

[10] OBSERVATION OF CRYSTALLINE C3N4 [J].

YU, KM ;

COHEN, ML ;

HALLER, EE ;

HANSEN, WL ;

LIU, AY ;

WU, IC .

PHYSICAL REVIEW B, 1994, 49 (07) :5034-5037