Characterization of AlGaAs/AlAs waveguides for optical parametric interactions

被引:5
作者
Leo, G
Assanto, G
Durand, O
Berger, V
机构
[1] Univ Roma Tre, Natl Inst Phys Matter, I-00146 Rome, Italy
[2] Univ Roma Tre, Dept Elect Engn, I-00146 Rome, Italy
[3] Thales, Cent Rech Lab, F-91400 Orsay, France
关键词
D O I
10.1364/JOSAB.19.000902
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We report on the use of several complementary techniques for the optical characterization of semiconductor waveguides for parametric generation. Grating-assisted distributed coupling, x-ray reflectometry, and surface-emitting second-harmonic generation allowed us to evaluate the effective indices of the guided modes, the thickness of each constituent layer, and the modal birefringences of a multilayer AlGaAs/AlAs waveguide, respectively. With the experimental accuracy afforded by these techniques we could precisely infer the bulk refractive indices of various films to comply with the strict requirements for phase-matched guided-wave devices. (C) 2002 Optical Society of America.
引用
收藏
页码:902 / 910
页数:9
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