USE OF FOURIER-TRANSFORM IN GRAZING X-RAYS REFLECTOMETRY

被引：34

作者：

BRIDOU, F ^{[1
]}

PARDO, B ^{[1
]}

机构：

[1] UNIV PARIS 06,INST OPT,F-75252 PARIS 05,FRANCE

来源：

JOURNAL DE PHYSIQUE III | 1994年 / 4卷 / 09期

关键词：

D O I：

10.1051/jp3:1994219

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Grazing X-ray reflectometry allows the analysis of thin layer stacks. The fitting of the reflectivity curve by a trial and error method can be used in order to determine the parameters of the films. Fourier analysis of the experimental reflectivity can directly give a rough determination of the profil index. Application to real examples shows the validity of the method.

引用

页码：1523 / 1531

页数：9

共 8 条

[1] PROPAGATION OF A SINUSOIDAL ELECTROMAGNETIC-WAVE IN PERIODICALLY STRATIFIED MEDIA [J].