Structural characterization of laser ablated epitaxial (Ba0.5Sr0.5)TiO3 thin films on MgO(001) by synchrotron x-ray scattering

被引:17
作者
Kim, S
Kang, TS
Je, JH [1 ]
机构
[1] Pohang Univ Sci & Technol, Dept Mat Sci & Engn, Pohang 790784, South Korea
[2] Sunchon Natl Univ, Dept Mat Sci & Met Engn, Sunchon 540742, South Korea
关键词
D O I
10.1557/JMR.1999.0388
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Epitaxial (Ba0.5Sr0.5) TiO3 thin films of two different thickness (similar to 25 and similar to 134 nm) on MgO(001) prepared by a pulsed laser deposition method were studied by synchrotron x-ray scattering measurements. The film grew initially with a cube-on-cube relationship, maintaining it during further growth. As the film grew, the surface of the film became significantly rougher, but the interface between the film and the substrate did not. In the early stage of growth, the film was highly strained in a tetragonal structure (c/a = 1.04) with the longer axis parallel to the surface normal direction. As the growth proceeded further, it relaxed to a cubic structure with the lattice parameter near the bulk value, and the mosaic distribution improved significantly in both in- and out-of-plane directions. The thinner film (similar to 25 nm) showed only one domain limited mainly by the film thickness, but the thicker film (similar to 134 nm) exhibited three domains along the surface normal direction.
引用
收藏
页码:2905 / 2911
页数:7
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