FERROELECTRIC PROPERTIES IN EPITAXIALLY GROWN BAXSR1-XTIO3 THIN-FILMS

被引:194
作者
ABE, K
KOMATSU, S
机构
[1] Materials and Devices Research Laboratories, R and D Center, Toshiba Corporation, Saiwaiku, Kawasaki 210, Komukai Toshiba-cho
关键词
D O I
10.1063/1.359120
中图分类号
O59 [应用物理学];
学科分类号
摘要
Induced ferroelectricity was observed in epitaxially grown Ba xSr1-xTiO3 (BST) thin films with thicknesses of about 220 nm. The BST films with various Ba content were deposited at 600 °C on Pt/MgO substrates, by radio frequency magnetron sputtering with double targets, BaTiO3 and SrTiO3. The epitaxial growth of the BST films was confirmed with x-ray-diffraction and reflection high-energy electron-diffraction analyses. The D-E hysteresis curve and the Curie temperature shift confirmed the BST films with Ba content x≥0.44 had ferroelectricity at room temperature. The mechanism of the ferroelectricity appearance was discussed in relation to the elongation of the c axis in the thickness direction, caused by lattice mismatch between Pt and BST. © 1995 American Institute of Physics.
引用
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页码:6461 / 6465
页数:5
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