Fabrication of single-walled carbon-nanotube-based pressure sensors

被引:277
作者
Stampfer, C [1 ]
Helbling, T
Obergfell, D
Schöberle, B
Tripp, MK
Jungen, A
Roth, S
Bright, VM
Hierold, C
机构
[1] ETH, CH-8092 Zurich, Switzerland
[2] Max Planck Inst Solid State Res, D-70569 Stuttgart, Germany
[3] Univ Colorado, Dept Mech Engn, Boulder, CO 80309 USA
关键词
D O I
10.1021/nl052171d
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
We report on the fabrication and characterization of bulk micromachined pressure sensors based on individual single-walled carbon nanotubes (SWNTs) as the active electromechanical transducer elements. The electromechanical sensor device consists of an individual electrically connected SWNT adsorbed on top of a 100-nm-thick atomic layer deposited (ALD) circular alumina (Al2O3) membrane with a radius in the range of 50-100 mu m. A white light interferometer (WLI) was used to measure the deflection of the membrane due to differential pressure, and the mechanical properties of the device were characterized by bulge testing. Finally, we performed the first electromechanical measurements on strained metallic SWNTs adhering to a membrane and found a piezoresistive gauge factor of approximately 210 for metallic SWNTs.
引用
收藏
页码:233 / 237
页数:5
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