Marvelous mems - Advanced IC sensors and microstructures for high-volume applications.

被引：64

作者：

Bryzek, J ^{[1
]}

Roundy, S

Bircumshaw, B

Chung, C

Castellino, K

Steller, JR

Vestel, M

机构：

[1] LVSI, Emeryville, CA 94608 USA

[2] SRI Int, Menlo Pk, CA 94025 USA

来源：

IEEE CIRCUITS & DEVICES | 2006年 / 22卷 / 02期

关键词：

D O I：

10.1109/MCD.2006.1615241

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 [电气工程]; 0809 [电子科学与技术];

摘要：

Microelectromechanical systems (MEMS) are a foundation for a broad range of mechanical, chemical, optical, and biotech products fabricated as integrated circuits on silicon wafers in a batch mode. Major MEMS sensing technologies include piezoresistive, capacitive, resonant, piezoelectric and thermoelectric. These technologies are now being employed in gyroscopes, microphones, spectrometers, liquid chromatographs, bio-labs on the chip, chemical, biological, and nanochemical. MEMS microstructures that are also drawing interest include actuators, displays, ink-jet printers, radio-frequency MEMS, and resonators. With these very wide range of applications, the MEMS market is estimated to increase by US$32 billion in the near future. Much of this growth will occur as a result of venture capital funding.

引用

页码：8 / 28

页数：21

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