Imaging at the picoscale

被引:20
作者
Bleloch, Andrew [1 ]
Lupini, Andrew [2 ]
机构
[1] CLRC Daresbury, SuperSTEM Lab, Daresbury WA4 4AD, Cheshire, England
[2] Oak Ridge Natl Lab, Condensed Matter Sci Div, Oak Ridge, TN 37831 USA
基金
英国工程与自然科学研究理事会;
关键词
D O I
10.1016/S1369-7021(04)00570-X
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Products that continue to improve both in price and performance are a surprising but welcome feature of what has been the micro-age and is now becoming the nano-age. This virtuous circle is driven by miniaturization. Electron microscopy has constantly played a crucial role in elucidating the developing science and technology, having resolution measured in nanometers in the micro-age and, over the last five years, moving to resolution measured in picometers in the nano-age. The principal breakthrough that has enabled this recent rapid improvement in electron microscopy is the correction of electron-optical aberrations. The realization of this improvement (the principle has been known since 1947) is in turn crucially dependent on the very electronic and computer technology it has played a role in enabling.
引用
收藏
页码:42 / 48
页数:7
相关论文
共 38 条
[1]   REQUIREMENTS CONTRIBUTING TO THE DESIGN OF DEVICES USED IN CORRECTING ELECTRON LENSES [J].
ARCHARD, GD .
BRITISH JOURNAL OF APPLIED PHYSICS, 1954, 5 (AUG) :294-299
[2]   A POSSIBLE CHROMATIC CORRECTION SYSTEM FOR ELECTRON LENSES [J].
ARCHARD, GD .
PROCEEDINGS OF THE PHYSICAL SOCIETY OF LONDON SECTION B, 1955, 68 (11) :817-829
[3]   2 NEW SIMPLIFIED SYSTEMS FOR THE CORRECTION OF SPHERICAL ABERRATION IN ELECTRON LENSES [J].
ARCHARD, GD .
PROCEEDINGS OF THE PHYSICAL SOCIETY OF LONDON SECTION B, 1955, 68 (03) :156-164
[4]   SIMULTANEOUS STEM IMAGING AND ELECTRON-ENERGY-LOSS SPECTROSCOPY WITH ATOMIC-COLUMN SENSITIVITY [J].
BATSON, PE .
NATURE, 1993, 366 (6457) :727-728
[5]  
Beck V., 1974, P 32 ANN EMSA M ST L, P426
[6]  
Beck V., 1977, P 32 EMSA, P90
[7]  
Beck V., 1976, P 34 EMSA, P578
[8]  
BECK VD, 1979, OPTIK, V53, P241
[9]  
BERNHARD W, 1980, OPTIK, V57, P73
[10]   Maximum-likelihood method for focus-variation image reconstruction in high resolution transmission electron microscopy [J].
Coene, WMJ ;
Thust, A ;
deBeeck, M ;
VanDyck, D .
ULTRAMICROSCOPY, 1996, 64 (1-4) :109-135