Deposition and characterization of transparent thin films of zinc oxide doped with Bi and Sb

被引:59
作者
Gulino, A [1 ]
Fragala, I [1 ]
机构
[1] Univ Catania, Dipartimento Sci Chim, I-95125 Catania, Italy
关键词
D O I
10.1021/cm011088y
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Undoped and Bi/Sb doped highly transparent ZnO films were grown adopting metal organic chemical vapor deposition with suitable combinations of Zn(C5F6HO2)(2).2H(2)O.(CH3OCH2-CH2)(2)O, Bi(C6H5)(3), and Sb(C6H5)(3) precursors. Hexagonal ZnO phases were always found. Doping levels ranged from 1.4 to 7.4 and from 0.2 to1.8 atomic % for Bi and Sb, respectively. UV-vis measurements indicated that the film transmittance was usually as high as 90% in the visible and near-infrared region. Dopant surface segregation was found in X-ray photoelectron spectroscopy experiments. Preliminary resistivity measurements indicated that lightly doped ZnO films are semiconducting while greater doping levels could result in potential varistor properties.
引用
收藏
页码:116 / 121
页数:6
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