共 62 条
[2]
BRANDRUP J, 1988, POLYM HDB
[3]
BRETZ KC, 1997, B AM PHYS SOC, V42, P648
[4]
Comparison of resist collapse properties for deep ultraviolet and 193 nm resist platforms
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
2000, 18 (06)
:3303-3307
[6]
Molecular weight dependence of reductions in the glass transition temperature of thin, freely standing polymer films
[J].
PHYSICAL REVIEW E,
2001, 63 (03)
[7]
Glass transition reductions in thin freely-standing polymer films: A scaling analysis of chain confinement effects
[J].
JOURNAL DE PHYSIQUE IV,
2000, 10 (P7)
:221-226
[10]
Dutcher JR, 1998, ABSTR PAP AM CHEM S, V215, pU484