Early stages of oxidation of aluminum nitride

被引：14

作者：

Geng, YJ ^{[1
]}

Norton, MG ^{[1
]}

机构：

[1] Washington State Univ, Sch Mech & Mat Engn, Pullman, WA 99164 USA

来源：

JOURNAL OF MATERIALS RESEARCH | 1999年 / 14卷 / 07期

关键词：

D O I：

10.1557/JMR.1999.0363

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The early stages of oxidation of aluminum nitride have been studied by transmission electron microscopy and electron diffraction. It has been found that the oxide layer grows by the Stranki-Krastonow mechanism, where an initial uniform layer is followed by island formation. The onset of oxidation occurs at 800 degrees C and the initial oxide phase that forms is gamma-Al2O3, one of the transition aluminas. The orientation relationship between the oxide layer and the underlying nitride is (440)gamma parallel to(11 (2) over bar 0)(AIN) and [(1) over bar 12]gamma parallel to[01 (1) over bar 0](AIN).

引用

页码：2708 / 2711

页数：4

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