Microlens array produced using hot embossing process

被引：168

作者：

Ong, NS ^{[1
]}

Koh, YH ^{[1
]}

Fu, YQ ^{[1
]}

机构：

[1] Nanyang Technol Univ, Sch Mech & Prod Engn, Singapore 639798, Singapore

来源：

MICROELECTRONIC ENGINEERING | 2002年 / 60卷 / 3-4期

关键词：

microlens array; focused ion beams; hot embossing;

D O I：

10.1016/S0167-9317(01)00695-5

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, the fabrication of molds that are suitable for the production of microlens arrays using the replication technique is discussed. Variation of parameters in the replication process were investigated. A focused ion beam was used to fabricate the microlens cavities on three materials, with silicon showing the best result. Hot embossing was used to produce replicated polycarbonate lens array. The temperature of the mold and the embossing force were the two parameters varied. The microlens array produced using the embossing replication process demonstrates the possibility of nanometre fabrication. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：365 / 379

页数：15

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