Picolitre acoustic droplet ejection by ferntosecond laser micromachined multiple-orifice membrane-based 2D ejector arrays

被引：7

作者：

Demirci, U ^{[1
]}

Ozcan, A ^{[1
]}

机构：

[1] Stanford Univ, Edward L Ginzton Lab, Stanford, CA 94305 USA

来源：

ELECTRONICS LETTERS | 2005年 / 41卷 / 22期

关键词：

D O I：

10.1049/el:20053208

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 [电气工程]; 0809 [电子科学与技术];

摘要：

Described is a new method of generating droplets by using the higher-order resonance mode shape displacement of a two-dimensional (213) silicon nitride membrane array with multiple orifices, fabricated by a femtosecond laser. This higher-order resonance ejection method increases the flow rate per membrane on a 2D ejector array and introduces the capability to eject from various locations on a membrane. Combined with the simplicity and the functionality of femtosecond laser micromachining, the novel devices are especially well suited for continuously generating picolitre droplets for various applications in biotechnology and the semiconductor industry.

引用

页码：1219 / 1220

页数：2

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