Calculation of crater profiles on a flat cathode in a direct current glow discharge

被引:46
作者
Bogaerts, A
Gijbels, R
机构
关键词
crater profile; direct current glow discharge; Monte Carlo modeling;
D O I
10.1016/S0584-8547(97)82786-3
中图分类号
O433 [光谱学];
学科分类号
0703 ; 070302 ;
摘要
A three-dimensional hybrid set of models (Monte Carlo and fluid models) for the different plasma species in a glow discharge is used to calculate crater profiles on a flat cathode in the VG9000 direct current glow discharge cell. The characteristic crater profiles found experimentally are at least qualitatively predicted by the modeling work: (i) the crater is deeper at the edges than in the center (called the ''crater edge effect''), (ii) the crater walls are not completely steep, (iii) the crater bottom can be concave, convex or flat, and (iv) there is a rim outside the crater profile due to redeposition of material. The crater edge effect is the most pronounced feature in the calculated profiles, and arises from the anodic front plate at 0.5 mm from the cathode surface. As this effect impairs depth resolution in depth-profiling, some modifications to the cell geometry are proposed, which are expected to eliminate or minimize this effect. (C) 1997 Elsevier Science B.V.
引用
收藏
页码:765 / 777
页数:13
相关论文
共 32 条
[1]   DEPTH PROFILING OF FRICTIONAL BRASS COATED STEEL SAMPLES BY GLOW-DISCHARGE MASS-SPECTROMETRY [J].
BEHN, U ;
GERBIG, FA ;
ALBRECHT, H .
FRESENIUS JOURNAL OF ANALYTICAL CHEMISTRY, 1994, 349 (1-3) :209-210
[2]   QUANTITATIVE DEPTH PROFILE ANALYSIS BY GLOW-DISCHARGE [J].
BENGTSON, A .
SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 1994, 49 (04) :411-429
[3]   MONTE-CARLO SIMULATION OF AN ANALYTICAL GLOW-DISCHARGE - MOTION OF ELECTRONS, IONS AND FAST NEUTRALS IN THE CATHODE DARK SPACE [J].
BOGAERTS, A ;
VANSTRAATEN, M ;
GIJBELS, R .
SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 1995, 50 (02) :179-196
[4]   HYBRID MONTE-CARLO FLUID MODEL OF A DIRECT-CURRENT GLOW-DISCHARGE [J].
BOGAERTS, A ;
GIJBELS, R ;
GOEDHEER, WJ .
JOURNAL OF APPLIED PHYSICS, 1995, 78 (04) :2233-2241
[5]   THE ROLE OF FAST ARGON IONS AND ATOMS IN THE IONIZATION OF ARGON IN A DIRECT-CURRENT GLOW-DISCHARGE - A MATHEMATICAL SIMULATION [J].
BOGAERTS, A ;
GIJBELS, R .
JOURNAL OF APPLIED PHYSICS, 1995, 78 (11) :6427-6431
[6]   DESCRIPTION OF THE THERMALIZATION PROCESS OF THE SPUTTERED ATOMS IN A GLOW-DISCHARGE USING A 3-DIMENSIONAL MONTE-CARLO METHOD [J].
BOGAERTS, A ;
VANSTRAATEN, M ;
GIJBELS, R .
JOURNAL OF APPLIED PHYSICS, 1995, 77 (05) :1868-1874
[7]   Role of sputtered Cu atoms and ions in a direct current glow discharge: Combined fluid and Monte Carlo model [J].
Bogaerts, A ;
Gijbels, R .
JOURNAL OF APPLIED PHYSICS, 1996, 79 (03) :1279-1286
[8]   MODELING OF METASTABLE ARGON ATOMS IN A DIRECT-CURRENT GLOW-DISCHARGE [J].
BOGAERTS, A ;
GIJBELS, R .
PHYSICAL REVIEW A, 1995, 52 (05) :3743-3751
[9]   Two-dimensional model of a direct current glow discharge: Description of the argon metastable atoms, spattered atoms, and ions [J].
Bogaerts, A ;
Gijbels, R .
ANALYTICAL CHEMISTRY, 1996, 68 (15) :2676-2685
[10]   Two-dimensional model of a direct current glow discharge: Description of the electrons, argon ions, and fast argon atoms [J].
Bogaerts, A ;
Gijbels, R ;
Goedheer, WJ .
ANALYTICAL CHEMISTRY, 1996, 68 (14) :2296-2303