Luminescent and structural characteristics of ZnO nanorods fabricated by postannealing

被引:2
作者
Lin, CC
Liao, HC
Chen, SY
Cheng, SY
机构
[1] Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 30050, Taiwan
[2] Ind Technol Res Inst, Mat Res Labs, Chutung 31041, Taiwan
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2006年 / 24卷 / 01期
关键词
D O I
10.1116/1.2163893
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Well-aligned ZnO nanorods grown on silicon substrates buffered with ZnO film were postannealed at 200-1000 degrees C in various atmospheres. The optical properties of ZnO nanorods were much improved by annealing at high temperatures in both atmospheres of N-2 and O-2. This improvement was ascribed to the decrease in structure defects as compared to as-grown ZnO nanorods. However, for the ZnO nanorods annealed in H-2/N-2, a stronger UV emission occurs at 600 degrees C; above that the UV emission rapidly disappeared, which was attributed to the collapse of the ZnO nanorods due to H-2 etching during a higher-temperature annealing in H-2/N-2. The crystallinity and optical properties of the ZnO nanorods can be controlled by postannealing treatment. (c) 2006 American Vacuum Society.
引用
收藏
页码:304 / 307
页数:4
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