Aerosol-assisted chemical vapour deposition (AACVD) of silver films from triphenylphosphine adducts of silver β-diketonates and β-diketoiminates, including the structure of [Ag(hfac)(PPh3)]

被引：63

作者：

Edwards, DA ^{[1
]}

Harker, RM ^{[1
]}

Mahon, MF ^{[1
]}

Molloy, KC ^{[1
]}

机构：

[1] Univ Bath, Dept Chem, Bath BA2 7AY, Avon, England

来源：

JOURNAL OF MATERIALS CHEMISTRY | 1999年 / 9卷 / 08期

关键词：

D O I：

10.1039/a901937e

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Triphenylphosphine adducts of silver beta-diketonates [AgL(PPh3)] (L = acac, dpm, tfac, hfac, fod) and beta-ketoiminates (L = hfacNhex, hfacNchex) have been synthesised and evaluated as precursors for the deposition of silver films using aerosol-assisted chemical vapour deposition methodology. The 1:1 stoichiometry of the adducts has been established by P-31 and Ag-109 NMR and a crystal structure of [Ag(hfac)(PPh3)]. The best films were obtained from the two beta-ketoiminates, particularly L = hfacNhex. While [AgL(PPh3)] (L = acac, dpm) gave almost no deposition, the complex with L = tfac gave a film comparable with the two beta-ketoiminates while other films showed poor reflectivity (L= hfac, fod).

引用

页码：1771 / 1780

页数：10