Micromachined electrodes for high density neural stimulation systems

被引：16

作者：

Hung, A ^{[1
]}

Zhou, D ^{[1
]}

Greenberg, R ^{[1
]}

Judy, JW ^{[1
]}

机构：

[1] Univ Calif Los Angeles, Biomed Engn IDP, Los Angeles, CA 90094 USA

来源：

FIFTEENTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 2002年

关键词：

D O I：

10.1109/MEMSYS.2002.984082

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

High-resolution retinal prosthetic systems require high-density stimulation electrodes to restore the vision of blind patients suffering from retinitis pigmentosa and macular degeneration. Micromachining the surface of electrodes to obtain high aspect ratio features can tremendously increase the effective area of the electrode. A unique process has been developed to obtain high aspect ratio structures by plating on the sidewall of recently developed and insufficiently rinsed resist. A quadrupling of the effective area of the electrode surface has been achieved with modest micromachining and should translate into a similar improvement in visual resolution.

引用

页码：56 / 59

页数：4

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