Photonic crystals for the visible spectrum by holographic lithography

被引:53
作者
Sharp, DN
Campbell, M
Dedman, ER
Harrison, MT
Denning, RG
Turberfield, AJ
机构
[1] Univ Oxford, Dept Phys, Clarendon Lab, Oxford OX1 3PU, England
[2] Univ Oxford, Dept Chem, Inorgan Chem Lab, Oxford OX1 3QR, England
[3] Corning Res Ctr, Martlesham Heath IP5 3RE, Ipswitch, England
基金
英国工程与自然科学研究理事会;
关键词
holographic lithography; photonic crystal; SU8;
D O I
10.1023/A:1013387015192
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We describe a general and flexible technique for the fabrication of three-dimensional photonic crystals that is particularly well adapted to the production of structures with the sub-micron periodicity required for applications in the visible optical spectrum. Three-dimensional microstructure is generated by using a four-beam laser interference pattern to expose a thick layer of photoresist. Exposed areas are rendered insoluble; unexposed areas are dissolved away leaving a three-dimensional photonic crystal formed of cross-linked polymer with air-filled voids. The polymeric structure may be used as a template for the production of photonic crystals with higher refractive index contrast. Photonic crystals made of polymer and of TiO2 have been characterized by scanning electron microscopy and by optical diffraction measurements.
引用
收藏
页码:3 / 12
页数:10
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