Photonic crystals for the visible spectrum by holographic lithography

被引:53
作者
Sharp, DN
Campbell, M
Dedman, ER
Harrison, MT
Denning, RG
Turberfield, AJ
机构
[1] Univ Oxford, Dept Phys, Clarendon Lab, Oxford OX1 3PU, England
[2] Univ Oxford, Dept Chem, Inorgan Chem Lab, Oxford OX1 3QR, England
[3] Corning Res Ctr, Martlesham Heath IP5 3RE, Ipswitch, England
基金
英国工程与自然科学研究理事会;
关键词
holographic lithography; photonic crystal; SU8;
D O I
10.1023/A:1013387015192
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We describe a general and flexible technique for the fabrication of three-dimensional photonic crystals that is particularly well adapted to the production of structures with the sub-micron periodicity required for applications in the visible optical spectrum. Three-dimensional microstructure is generated by using a four-beam laser interference pattern to expose a thick layer of photoresist. Exposed areas are rendered insoluble; unexposed areas are dissolved away leaving a three-dimensional photonic crystal formed of cross-linked polymer with air-filled voids. The polymeric structure may be used as a template for the production of photonic crystals with higher refractive index contrast. Photonic crystals made of polymer and of TiO2 have been characterized by scanning electron microscopy and by optical diffraction measurements.
引用
收藏
页码:3 / 12
页数:10
相关论文
共 42 条
  • [11] PHOTONIC BAND-GAPS IN 3-DIMENSIONS - NEW LAYER-BY-LAYER PERIODIC STRUCTURES
    HO, KM
    CHAN, CT
    SOUKOULIS, CM
    BISWAS, R
    SIGALAS, M
    [J]. SOLID STATE COMMUNICATIONS, 1994, 89 (05) : 413 - 416
  • [12] Synthesis of macroporous minerals with highly ordered three-dimensional arrays of spheroidal voids
    Holland, BT
    Blanford, CF
    Stein, A
    [J]. SCIENCE, 1998, 281 (5376) : 538 - 540
  • [13] Ordered macroporous materials by emulsion templating
    Imhof, A
    Pine, DJ
    [J]. NATURE, 1997, 389 (6654) : 948 - 951
  • [14] Self-assembly of ordered microporous materials from rod-coil block copolymers
    Jenekhe, SA
    Chen, XL
    [J]. SCIENCE, 1999, 283 (5400) : 372 - 375
  • [15] QUANTUM OPTICS OF LOCALIZED LIGHT IN A PHOTONIC BAND-GAP
    JOHN, S
    WANG, J
    [J]. PHYSICAL REVIEW B, 1991, 43 (16): : 12772 - 12789
  • [16] Quantum optical spin-glass state of impurity two-level atoms in a photonic band gap
    John, S
    Quang, T
    [J]. PHYSICAL REVIEW LETTERS, 1996, 76 (08) : 1320 - 1323
  • [17] Kapitonov AM, 1998, PHYS STATUS SOLIDI A, V165, P119, DOI 10.1002/(SICI)1521-396X(199801)165:1<119::AID-PSSA119>3.0.CO
  • [18] 2-Y
  • [19] Fabrication of submicrometre 3D periodic structures composed of Si/SiO2
    Kawakami, S
    [J]. ELECTRONICS LETTERS, 1997, 33 (14) : 1260 - 1261
  • [20] Micromachining applications of a high resolution ultrathick photoresist
    Lee, KY
    LaBianca, N
    Rishton, SA
    Zolgharnain, S
    Gelorme, JD
    Shaw, J
    Chang, THP
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1995, 13 (06): : 3012 - 3016