Field emission from dense, sparse, and patterned arrays of carbon nanofibers

被引:274
作者
Teo, KBK
Chhowalla, M
Amaratunga, GAJ
Milne, WI
Pirio, G
Legagneux, P
Wyczisk, F
Pribat, D
Hasko, DG
机构
[1] Univ Cambridge, Dept Engn, Cambridge CB2 1PZ, England
[2] Thales Res & Technol, F-91404 Orsay, France
[3] Univ Cambridge, Cavendish Lab, Microelect Res Ctr, Cambridge CB3 0HE, England
关键词
D O I
10.1063/1.1461868
中图分类号
O59 [应用物理学];
学科分类号
摘要
We compare the field emission characteristics of dense (10(9) nanofibers/cm(2)), sparse (10(7) nanofibers/cm(2)), and patterned arrays (10(6) nanofibers/cm(2)) of vertically aligned carbon nanofibers on silicon substrates. The carbon nanofibers were prepared using plasma-enhanced chemical vapor deposition of acetylene and ammonia gases in the presence of a nickel catalyst. We demonstrate how the density of carbon nanofibers can be varied by reducing the deposition yield through nickel interaction with a diffusion layer or by direct lithographic patterning of the nickel catalyst to precisely position each nanofiber. The patterned array of individual vertically aligned nanofibers had the most desirable field emission characteristics, highest apparent field enhancement factor, and emission site density. (C) 2002 American Institute of Physics.
引用
收藏
页码:2011 / 2013
页数:3
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