Novel methods of nanoscale wire formation

被引:105
作者
Prokes, SM
Wang, KL
机构
[1] Naval Research Laboratory, Code 6862, 4555 Overlook Ave. S.W., Washington
关键词
D O I
10.1557/S0883769400052842
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
One of the most popular techniques in used to produce artificial structure of quantum wires with sub-100-nm features is nanofabrication. This technique involves the formation of a pattern on material and the transfer of this pattern to form nanometer-sized features. In general, the pattern is formed by selective irradiation of a photoresist, using electrons, ions, or ultraviolet light. The patterned regions of the resist are then dissolved in a specific solvent. The final nanoscale features are formed in the underlying material by the use of dry etching techniques.
引用
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页码:13 / 19
页数:7
相关论文
共 27 条
[1]   COMPLEX DYNAMICS OF MESOSCOPIC MAGNETS [J].
AWSCHALOM, DD ;
DIVINCENZO, DP .
PHYSICS TODAY, 1995, 48 (04) :43-48
[2]   Significant decrease of the lattice thermal conductivity due to phonon confinement in a free-standing semiconductor quantum well [J].
Balandin, A ;
Wang, KL .
PHYSICAL REVIEW B, 1998, 58 (03) :1544-1549
[3]  
DOBISZ EA, 1996, NANOMATERIALS SYNTHE, P497
[4]   Magnetization processes in nickel and cobalt electrodeposited nanowires [J].
Ferre, R ;
Ounadjela, K ;
George, JM ;
Piraux, L ;
Dubois, S .
PHYSICAL REVIEW B, 1997, 56 (21) :14066-14075
[5]   ENERGY-DEPENDENCE AND DEPTH DISTRIBUTION OF DRY ETCHING-INDUCED DAMAGE IN III/V SEMICONDUCTOR HETEROSTRUCTURES [J].
GERMANN, R ;
FORCHEL, A ;
BRESCH, M ;
MEIER, HP .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1989, 7 (06) :1475-1478
[6]   Overview of nanoelectronic devices [J].
Goldhaber-Gordon, D ;
Montemerlo, MS ;
Love, JC ;
Opiteck, GJ ;
Ellenbogen, JC .
PROCEEDINGS OF THE IEEE, 1997, 85 (04) :521-540
[7]   NEW ONE-DIMENSIONAL CONDUCTORS - GRAPHITIC MICROTUBULES [J].
HAMADA, N ;
SAWADA, S ;
OSHIYAMA, A .
PHYSICAL REVIEW LETTERS, 1992, 68 (10) :1579-1581
[8]   INTERSUBBAND RESONANCE IN QUASI ONE-DIMENSIONAL INVERSION CHANNELS [J].
HANSEN, W ;
HORST, M ;
KOTTHAUS, JP ;
MERKT, U ;
SIKORSKI, C ;
PLOOG, K .
PHYSICAL REVIEW LETTERS, 1987, 58 (24) :2586-2589
[9]   HELICAL MICROTUBULES OF GRAPHITIC CARBON [J].
IIJIMA, S .
NATURE, 1991, 354 (6348) :56-58
[10]   Nanowire formation in self-assembled monolayers from fluorocarbon-hydrocarbon on Au(111) [J].
Ishida, T ;
Mizutani, W ;
Tokumoto, H ;
Hokari, H ;
Azehara, H ;
Fujihira, M .
APPLIED SURFACE SCIENCE, 1998, 130 :786-791