Modern applications of a new 300 kV field emission transmission electron microscope to the study of advanced materials

Some instrumental features of a new 300 kV analytical transmission electron microscope with a field emission gun and its applications to structure and composition analysis of advanced materials at nanometer scales are given. In the few microscope, a fine electron probe of about 0.5 nm in size with a probe current of about 0.1 nA can be routinely applied for elemental analysis in combination with high resolution lattice imaging. A crystal structure of 33R-AlN polytype is determined from the single atomic layer level analysis using energy dispersive X-ray spectrometry (EDS). It is also shown that a Mew cubic B-C-N compound is identified to be a diamond-like structure from the observation of lattice image and electron energy loss spectrometry (EELS).