共 24 条
[1]
LATERAL DOPANT PROFILING IN SEMICONDUCTORS BY FORCE MICROSCOPY USING CAPACITIVE DETECTION
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1991, 9 (02)
:703-706
[5]
Scanning probe microscopy for 2-D semiconductor dopant profiling and device failure analysis
[J].
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY,
1996, 42 (1-3)
:88-98
[6]
HUISJER A, 1975, SURF SCI, V52, P202
[7]
Microscopic characterization of field emitter array structure and work function by scanning Maxwell-stress microscopy
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1996, 14 (03)
:2105-2109
[8]
Local work function for Cu(111)-Au surface studied by scanning tunneling microscopy
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1997, 15 (06)
:1861-1864