Microstructures containing piezomagnetic elements

被引：16

作者：

Gibbs, MRJ ^{[1
]}

Watts, R ^{[1
]}

Karl, W ^{[1
]}

Powell, AL ^{[1
]}

Yates, RB ^{[1
]}

机构：

[1] UNIV SHEFFIELD,DEPT ELECT & ELECT ENGN,SHEFFIELD MICROELECTROMECH SYST UNIT,SHEFFIELD S1 3JD,S YORKSHIRE,ENGLAND

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1997年 / 59卷 / 1-3期

基金：

英国工程与自然科学研究理事会;

关键词：

piezomagnetism; magnetostriction; microelectromechanical systems; pressure sensor;

D O I：

10.1016/S0924-4247(97)80180-X

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper we review the current status for the growth and characterisation of thin film piezomagnetic materials. We go on to evaluate their performance in microelectromechanical systems, highlighting the particular features to be gained from their introduction. We also present the design and initial implementation of st pressure sensor prototype bringing these features together. (C) 1997 Elsevier Science S.A.

引用

页码：229 / 235

页数：7

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