Transfer printing by kinetic control of adhesion to an elastomeric stamp

被引:1265
作者
Meitl, MA
Zhu, ZT
Kumar, V
Lee, KJ
Feng, X
Huang, YY
Adesida, I
Nuzzo, RG
Rogers, JA
机构
[1] Univ Illinois, Dept Mat Sci & Engn, Beckman Inst, Urbana, IL 61801 USA
[2] Univ Illinois, Seitz Mat Res Lab, Urbana, IL 61801 USA
[3] Univ Illinois, Dept Chem, Beckman Inst, Urbana, IL 61801 USA
[4] Univ Illinois, Dept Elect & Comp Engn, Micro & Nanotechnol Lab, Urbana, IL 61801 USA
[5] Univ Illinois, Dept Mech & Ind Engn, Urbana, IL 61801 USA
基金
美国国家科学基金会;
关键词
D O I
10.1038/nmat1532
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
An increasing number of technologies require large-scale integration of disparate classes of separately fabricated objects into spatially organized, functional systems(1-9). Here we introduce an approach for heterogeneous integration based on kinetically controlled switching between adhesion and release of solid objects to and from an elastomeric stamp. We describe the physics of soft adhesion that govern this process and demonstrate the method by printing objects with a wide range of sizes and shapes, made of single-crystal silicon and GaN, mica, highly ordered pyrolytic graphite, silica and pollen, onto a variety of substrates without specially designed surface chemistries or separate adhesive layers. Printed p-n junctions and photodiodes fixed directly on highly curved surfaces illustrate some unique device-level capabilities of this approach.
引用
收藏
页码:33 / 38
页数:6
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