Anisotropy in detectivity of GaN Schottky ultraviolet detectors: Comparing lateral and vertical geometry

被引:58
作者
Katz, O [1 ]
Garber, V
Meyler, B
Bahir, G
Salzman, J
机构
[1] Technion Israel Inst Technol, Wolfson Microelect Res Ctr, Dept Elect Engn, IL-32000 Haifa, Israel
[2] Technion Israel Inst Technol, Ctr Microelect Res, IL-32000 Haifa, Israel
关键词
D O I
10.1063/1.1433910
中图分类号
O59 [应用物理学];
学科分类号
摘要
Vertical and lateral geometry GaN-based Schottky barrier photodetectors have been implemented, using similar quality material and the same fabrication process. The vertical detector exhibits two orders of magnitude higher responsivity. This is attributed to improved ohmic backcontacts, due to the highly doped buried layer. The vertical detectors exhibits also lower 1/f noise level, which is attributed to the reduced effect of dislocations on the carrier transport, resulting in lower mobility fluctuations. The vertical detector normalized detectivity is four orders of magnitude higher. (C) 2002 American Institute of Physics.
引用
收藏
页码:347 / 349
页数:3
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