Sol-gel preparation of single-layer, 0.75 μm thick lead zirconate titanate films from lead nitrate-titanium and zirconium alkoxide solutions containing polyvinylpyrrolidone

被引:72
作者
Takenaka, S [1 ]
Kozuka, H [1 ]
机构
[1] Kansai Univ, Dept Mat Sci & Engn, Osaka 5648680, Japan
关键词
D O I
10.1063/1.1419042
中图分类号
O59 [应用物理学];
学科分类号
摘要
Lead zirconate titanate (PZT) films were deposited on nesa silica glass substrates by spin coating using a Pb(NO3)(2)-Zr(OC3H7n)(4)-Ti(OC3H7i)(4) solution containing polyvinylpyrrolidone and acetylacetone. The coating solution had stable viscosity for over 1300 h at room temperature. Single-layer PZT films as thick as 0.75 mum could be obtained via single-step spin coating with successive gel film heat treatments at 80, 300, and 700 degreesC. The fired films were optically transparent and crack free, exhibiting P-E hysteresis loops with remanent polarization of 24.6 +/-1.6 muC cm(-2) and coercive field of 95.6 +/-9.8 kV cm(-1). (C) 2001 American Institute of Physics.
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页码:3485 / 3487
页数:3
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