A study in flip-chip UBM/bump reliability with effects of SnPb solder composition

被引:46
作者
Wu, JD [1 ]
Zheng, PJ [1 ]
Lee, CW [1 ]
Hung, SC [1 ]
Lee, JJ [1 ]
机构
[1] Adv Semicond Engn Inc, Kaohsiung, Taiwan
关键词
D O I
10.1016/j.microrel.2005.01.012
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper aims to investigate the electromigration phenomenon of under-bump-metallization (UBM) and solder bumps of a flip-chip package under high temperature operation life test (HTOL). UBM is a thin film Al/Ni(V)/Cu metal stack of 1.5 mu m; while bump material consists of Sn/37Pb, Sn/90Pb, and Sn/95Pb solder. Current densities of 2500 and 5000 A/cm(2) and ambient temperatures of 150-160 degrees C are applied to study their impact on electromigration. It is observed that bump temperature has more significant influence than current density does to bump failures. Owing to its higher melting point characteristics and less content of Sn phase, Sn/95Pb solder bumps are observed to have 13-fold improvement in Mean-Time-To-Failure (MTTF) than that of eutectic Sn/37Pb. Individual bump resistance history is calculated to evaluate UBM/bump degradation. The measured resistance increase is from bumps with electrical current flowing upward into UBM/bump interface (cathode), while bumps having opposite current polarity cause only minor resistance change. The identified failure sites and modes from aforementioned high resistance bumps reveal structural damages at the region of UBM and UBM/bump interface in forms of solder cracking or delamination. Effects of current polarity and crowding are key factors to observed electromigration behavior of flip-chip packages. (c) 2005 Elsevier Ltd. All rights reserved.
引用
收藏
页码:41 / 52
页数:12
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