An analytical (classical) subthreshold behavior model for symmetrical fully-depleted SOI double-gate MOSFET's

被引:1
作者
Chiang, TK [1 ]
机构
[1] So Taiwan Univ Technol, Dept Elect Engn, Tainan 710, Taiwan
关键词
double-gate MOSFET's; subthreshold swing degradation; threshold voltage roll-off; effective conducting path;
D O I
10.1080/02533839.2004.9670867
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Two dimensional device-physics-based analytical models are developed for subthreshold behavior in fully-depleted SOI double-gate MOSFET's. An analytical solution of Poisson's 2-D equation is employed to establish the design equation for the subthreshold behavior in the fully-depleted SOI double-gate MOSFET's. The concept of effective conducting path explains the silicon film thickness (t(si)), front and back oxide thickness (t(ox)) and doping density (N-A) unified dependence of subthreshold swing (S). Furthermore, alone, with the effective conducting path, the minimum channel potential is used to precisely predict the threshold voltage roll-off of the SOI double-gate MOSFET's. This analytical model not only gives physical insight into the fully-depleted SOI double-gate MOSFET's device physics, but also provides basic designing guidelines for fully-depleted double-gate MOSFET's.
引用
收藏
页码:223 / 230
页数:8
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