A comprehensive analytical subthreshold swing (S) model for double-gate MOSFETs

被引:151
作者
Chen, Q [1 ]
Agrawal, B
Meindl, JD
机构
[1] Georgia Inst Technol, Microelect Res Ctr, Atlanta, GA 30332 USA
[2] IBM Corp, EDA Lab, Hopewell Jct, NY 12533 USA
关键词
double-gate MOSFET; MOSFETs; scale length; scaling; subthreshold swing; undoped;
D O I
10.1109/TED.2002.1003757
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A general analytical subthreshold swing (S) model for symmetric DG MOSFETs is derived using evanescent-mode analysis. Through a concept of effective conducting path, it explains a unique doping concentration (N(A)) dependence of S, providing a unified understanding of previous S models and leading to a new improved S model for undoped DG MOSFETs. Compact, explicit expressions of a scale length are derived, which expedite projections of scalability of DG MOSFETs and its requirement.
引用
收藏
页码:1086 / 1090
页数:5
相关论文
共 13 条
[1]  
AGRAWAL B, 1994, THESIS RENSSELAER PO
[2]  
FOSSUM JG, 2001, P DIG GOV MICR APPL, P322
[3]  
Frank D. J., 1992, International Electron Devices Meeting 1992. Technical Digest (Cat. No.92CH3211-0), P553, DOI 10.1109/IEDM.1992.307422
[4]   Generalized scale length for two-dimensional effects in MOSFET's [J].
Frank, DJ ;
Taur, Y ;
Wong, HSP .
IEEE ELECTRON DEVICE LETTERS, 1998, 19 (10) :385-387
[5]  
Monroe D., 1998, P IEEE INT SOI C, P157
[6]   Analytic description of short-channel effects in fully-depleted double-gate and cylindrical, surrounding-gate MOSFETs [J].
Oh, SH ;
Monroe, D ;
Hergenrother, JM .
IEEE ELECTRON DEVICE LETTERS, 2000, 21 (09) :445-447
[7]  
Ren ZB, 2000, INTERNATIONAL ELECTRON DEVICES MEETING 2000, TECHNICAL DIGEST, P715, DOI 10.1109/IEDM.2000.904418
[8]   Electronic structures and phonon-limited electron mobility of double-gate silicon-on-insulator Si inversion layers [J].
Shoji, M ;
Horiguchi, S .
JOURNAL OF APPLIED PHYSICS, 1999, 85 (05) :2722-2731
[9]   SCALING THEORY FOR DOUBLE-GATE SOI MOSFETS [J].
SUZUKI, K ;
TANAKA, T ;
TOSAKA, Y ;
HORIE, H ;
ARIMOTO, Y .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1993, 40 (12) :2326-2329
[10]   Analytic solutions of charge and capacitance in symmetric and asymmetric double-gate MOSFETs [J].
Taur, Y .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2001, 48 (12) :2861-2869