Modification of tribological properties of iron thin films during joint implantation of carbon and zirconium ions

被引：4

作者：

Uglov, VV

Khodasevich, VV

Lapchuk, TM

Rusalsky, DP

Kasko, IV

机构：

[1] BELARUSSIAN STATE UNIV, MINSK 220080, BELARUS

[2] INST INTEGRATED CIRCUITS, FRAUNHOFER SOC, ERLANGEN, GERMANY

来源：

SURFACE & COATINGS TECHNOLOGY | 1997年 / 92卷 / 03期

关键词：

double ion implantation; tribological properties;

D O I：

10.1016/S0257-8972(97)00106-0

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The aim of the present work was to investigate the effect of zirconium and carbon implantation on iron films. Tribological properties, element and phase composition of iron thin-film samples during monoelement [C+, Zr+ --> Fe], subsequent [Zr+ --> (C+ --> Fe), C+ --> (Zr+ --> Fe)] and joint [(C+ + Zr+) --> Fe] implantation were investigated. (C) 1997 Published by Elsevier Science S.A.

引用

页码：190 / 196

页数：7

共 12 条

[1] MULTIPLY STRIPPED ION GENERATION IN THE METAL VAPOR VACUUM-ARC [J].