MULTIPLY STRIPPED ION GENERATION IN THE METAL VAPOR VACUUM-ARC

被引：166

作者：

BROWN, IG

FEINBERG, B

GALVIN, JE

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 63卷 / 10期

关键词：

D O I：

10.1063/1.340429

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：4889 / 4898

页数：10

相关论文

共 65 条

[1] REPETITIVELY PULSED METAL-ION BEAMS FOR ION-IMPLANTATION
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[2] ARCING VOLTAGE OF THE METAL VAPOR VACUUM-ARC
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[6] THE LBL EBIS TEST-STAND
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[7] ON THE CURRENT INTENSITY LIMIT OF A VACUUM-ARC ION-SOURCE
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[8] TRANSPORT AND ACCELERATION OF HIGH-CURRENT URANIUM ION-BEAMS
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[9] IMPROVED TIME-OF-FLIGHT ION CHARGE STATE DIAGNOSTIC
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[10] HIGH-CURRENT ION-SOURCE
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[J]. APPLIED PHYSICS LETTERS, 1985, 47 (04) : 358 - 360

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