Microstructure and ferroelectric properties of fine-grained BaxSr1-xTiO3 thin films prepared by metalorganic decomposition

被引:38
作者
Mohammed, MS [1 ]
Naik, R [1 ]
Mantese, JV [1 ]
Schubring, NW [1 ]
Micheli, AL [1 ]
Catalan, AB [1 ]
机构
[1] GM CORP,RES & DEV LABS,DEPT ELECT & ELECT,WARREN,MI 48090
关键词
D O I
10.1557/JMR.1996.0325
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Thin films of BaxSr1-xTiO3 (x = 0.7, 0.8, 0.9, and 1.0) were prepared by metalorganic decomposition (MOD). The relative permittivity, dissipation, polarization, resistivity, and grain size of these films were studied as a function of composition and temperature. Ferroelectric hysteresis loops were observed for all values of x and were found to be independent of measurement temperature though strongly dependent upon grain size.
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收藏
页码:2588 / 2593
页数:6
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