High-spatial-resolution phase measurement by micro-interferometry using a hard X-ray imaging microscope

With the aim towards high-spatial-resolution phase measurement, a novel hard X-ray micro-interferometer using an imaging microscope has been proposed and constructed at Hyogo-BL of SPring-8. It is a wavefront-division-type interferometer consisting of a twin zone plate arranged in the same plane. We have succeeded in producing good interference fringes with a visibility of as high as 60% at the photon energy of 9 keV. The fringe scanning method was applied to retrieve phase-shift distribution of a sample. The phase-shift distribution. of a 75-mum-thick kapton film and polystyrene microparticles could be imaged clearly with a spatial resolution of 160 nm and the obtained phase shift agreed well with the expected value.